JPH0444214B2 - - Google Patents

Info

Publication number
JPH0444214B2
JPH0444214B2 JP61194183A JP19418386A JPH0444214B2 JP H0444214 B2 JPH0444214 B2 JP H0444214B2 JP 61194183 A JP61194183 A JP 61194183A JP 19418386 A JP19418386 A JP 19418386A JP H0444214 B2 JPH0444214 B2 JP H0444214B2
Authority
JP
Japan
Prior art keywords
grating
light source
light
pitch
displacement detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61194183A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6350721A (ja
Inventor
Soji Ichikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Priority to JP19418386A priority Critical patent/JPS6350721A/ja
Priority to IN615/CAL/87A priority patent/IN168444B/en
Priority to US07/082,593 priority patent/US4912322A/en
Priority to DE3727188A priority patent/DE3727188C2/de
Priority to GB8719257A priority patent/GB2194044B/en
Priority to CN87106274.7A priority patent/CN1013705B/zh
Publication of JPS6350721A publication Critical patent/JPS6350721A/ja
Priority to GB9004757A priority patent/GB2228320B/en
Priority to GB9004758A priority patent/GB2228321B/en
Priority to IN235/CAL/90A priority patent/IN169778B/en
Priority to IN234/CAL/90A priority patent/IN169777B/en
Priority to IN236/CAL/90A priority patent/IN169779B/en
Publication of JPH0444214B2 publication Critical patent/JPH0444214B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP19418386A 1986-08-15 1986-08-20 光学式変位検出器 Granted JPS6350721A (ja)

Priority Applications (11)

Application Number Priority Date Filing Date Title
JP19418386A JPS6350721A (ja) 1986-08-20 1986-08-20 光学式変位検出器
IN615/CAL/87A IN168444B (en]) 1986-08-15 1987-08-07
US07/082,593 US4912322A (en) 1986-08-15 1987-08-07 Optical type displacement detecting device
DE3727188A DE3727188C2 (de) 1986-08-15 1987-08-14 Optische Verschiebungserfassungseinrichtung
GB8719257A GB2194044B (en) 1986-08-15 1987-08-14 Optical type displacement detecting device
CN87106274.7A CN1013705B (zh) 1986-08-15 1987-08-15 光学式位移检测装置
GB9004757A GB2228320B (en) 1986-08-15 1990-03-02 Optical type displacement detecting device
GB9004758A GB2228321B (en) 1986-08-15 1990-03-02 Optical type replacement detecting device
IN235/CAL/90A IN169778B (en]) 1986-08-15 1990-03-21
IN234/CAL/90A IN169777B (en]) 1986-08-15 1990-03-21
IN236/CAL/90A IN169779B (en]) 1986-08-15 1990-03-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19418386A JPS6350721A (ja) 1986-08-20 1986-08-20 光学式変位検出器

Publications (2)

Publication Number Publication Date
JPS6350721A JPS6350721A (ja) 1988-03-03
JPH0444214B2 true JPH0444214B2 (en]) 1992-07-21

Family

ID=16320319

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19418386A Granted JPS6350721A (ja) 1986-08-15 1986-08-20 光学式変位検出器

Country Status (1)

Country Link
JP (1) JPS6350721A (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1308970C (zh) 2001-02-07 2007-04-04 Tdk株式会社 磁致伸缩材料
JP2006153676A (ja) * 2004-11-30 2006-06-15 Ricoh Co Ltd 光学式エンコーダ装置及び画像形成装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5512528B2 (en]) * 1971-11-30 1980-04-02
JPS5023617A (en]) * 1973-06-29 1975-03-13
JPS5941123B2 (ja) * 1975-09-03 1984-10-04 株式会社日立製作所 光学的位置検出装置
US4218615A (en) * 1978-10-23 1980-08-19 Martin Marietta Corporation Incremental digital shaft encoder
JPS58140414U (ja) * 1982-03-18 1983-09-21 株式会社ニコン 光学格子の光電検出装置
JPS5961711A (ja) * 1982-09-30 1984-04-09 Matsushita Electric Works Ltd 反射型エンコ−ダ
JPS6023282A (ja) * 1983-07-15 1985-02-05 三菱電機株式会社 マンコンベアの駆動装置
JPS6347616A (ja) * 1986-08-15 1988-02-29 Ricoh Co Ltd 移動量測定方法

Also Published As

Publication number Publication date
JPS6350721A (ja) 1988-03-03

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees